Seebeck coefficient of material is a key parameter in thermoelectric characteristics research. In this paper, a precise Seebeck coefficient measurement system with wide range of temperatures from -100°C to 150°C was developed.
The Seebeck coefficient of metallic Ni was evaluated at different temperatures which show similar results. The system was able to measure the Seebeck coefficient of inorganic thin film material which resistance is over 1.65×108Ω. The measurement repeatability of the Seebeck coefficient was also evaluated.